Research in this area aims at developing novel methods to design, model, and control complicated mechatronic systems/ processes, including nano-positioning systems. Nano-positioning by means of piezoelectric actuators is at the core of several emerging research areas and tools including nano-technology and synchrotron-based imaging. Notably, the positioning accuracy can be significantly degraded by the creep, hysteresis, dynamics, and thermal effect of piezoelectric actuators. Aiming at improving positioning accuracy, we develop novel methods to model and control piezoelectric actuators.